11/8/2011	7:08:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/8/2011	7:08:07 AM	Recipe started at 7:08 AM
11/8/2011	7:08:07 AM	Helium valve closed
11/8/2011	7:08:07 AM	H2 valve closed
11/8/2011	7:08:07 AM	BCl3 valve closed
11/8/2011	7:08:07 AM	PH3 valve closed
11/8/2011	7:08:07 AM	SiCl4 pre valve closed
11/8/2011	7:08:07 AM	SiCl4 post valve closed
11/8/2011	7:08:07 AM	Main Vac valve closed
11/8/2011	7:08:07 AM	Bypass valve closed
11/8/2011	7:08:07 AM	Bubbler valve closed
11/8/2011	7:08:07 AM	Helium MFC set to  0.000000
11/8/2011	7:08:07 AM	H2 MFC set to  0.000000
11/8/2011	7:08:07 AM	BCl3 MFC set to  0.000000
11/8/2011	7:08:07 AM	PHl3 MFC set to  0.000000
11/8/2011	7:08:07 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:08:07 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:08:07 AM	Tube furnace set to 0
11/8/2011	7:08:10 AM	H2 valve closed
11/8/2011	7:08:10 AM	BCl3 valve closed
11/8/2011	7:08:10 AM	PH3 valve closed
11/8/2011	7:08:10 AM	SiCl4 pre valve closed
11/8/2011	7:08:10 AM	SiCl4 post valve closed
11/8/2011	7:08:10 AM	Main Vac valve closed
11/8/2011	7:08:10 AM	Bypass valve closed
11/8/2011	7:08:10 AM	Bubbler valve closed
11/8/2011	7:08:10 AM	Helium valve opened
11/8/2011	7:08:10 AM	Helium MFC set to  500.000000
11/8/2011	7:08:10 AM	H2 MFC set to  0.000000
11/8/2011	7:08:10 AM	BCl3 MFC set to  0.000000
11/8/2011	7:08:10 AM	PHl3 MFC set to  0.000000
11/8/2011	7:08:10 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:08:10 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:08:10 AM	Tube furnace set to 0
11/8/2011	7:09:16 AM	Helium valve closed
11/8/2011	7:09:16 AM	H2 valve closed
11/8/2011	7:09:16 AM	BCl3 valve closed
11/8/2011	7:09:16 AM	PH3 valve closed
11/8/2011	7:09:16 AM	SiCl4 pre valve closed
11/8/2011	7:09:16 AM	SiCl4 post valve closed
11/8/2011	7:09:16 AM	Main Vac valve closed
11/8/2011	7:09:16 AM	Bypass valve closed
11/8/2011	7:09:16 AM	Bubbler valve closed
11/8/2011	7:09:16 AM	Helium MFC set to  0.000000
11/8/2011	7:09:16 AM	H2 MFC set to  0.000000
11/8/2011	7:09:16 AM	BCl3 MFC set to  0.000000
11/8/2011	7:09:16 AM	PHl3 MFC set to  0.000000
11/8/2011	7:09:16 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:09:16 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:09:17 AM	Tube furnace set to 0
11/8/2011	7:09:18 AM	Run finished at 7:09 AM
11/8/2011	7:09:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/8/2011	7:14:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:14:44 AM	Recipe started at 7:14 AM
11/8/2011	7:14:44 AM	Helium valve closed
11/8/2011	7:14:44 AM	H2 valve closed
11/8/2011	7:14:44 AM	BCl3 valve closed
11/8/2011	7:14:44 AM	PH3 valve closed
11/8/2011	7:14:44 AM	SiCl4 pre valve closed
11/8/2011	7:14:44 AM	SiCl4 post valve closed
11/8/2011	7:14:44 AM	Main Vac valve closed
11/8/2011	7:14:44 AM	Bubbler valve closed
11/8/2011	7:14:44 AM	Bypass valve opened
11/8/2011	7:14:44 AM	Helium MFC set to  0.000000
11/8/2011	7:14:44 AM	H2 MFC set to  0.000000
11/8/2011	7:14:44 AM	BCl3 MFC set to  0.000000
11/8/2011	7:14:44 AM	PHl3 MFC set to  0.000000
11/8/2011	7:14:44 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:14:44 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:14:44 AM	Tube furnace set to 0
11/8/2011	7:15:56 AM	Helium valve closed
11/8/2011	7:15:56 AM	H2 valve closed
11/8/2011	7:15:56 AM	BCl3 valve closed
11/8/2011	7:15:56 AM	PH3 valve closed
11/8/2011	7:15:56 AM	SiCl4 pre valve closed
11/8/2011	7:15:56 AM	SiCl4 post valve closed
11/8/2011	7:15:56 AM	Main Vac valve closed
11/8/2011	7:15:56 AM	Bubbler valve closed
11/8/2011	7:15:56 AM	Bypass valve opened
11/8/2011	7:15:56 AM	Helium MFC set to  0.000000
11/8/2011	7:15:56 AM	H2 MFC set to  0.000000
11/8/2011	7:15:56 AM	BCl3 MFC set to  0.000000
11/8/2011	7:15:56 AM	PHl3 MFC set to  0.000000
11/8/2011	7:15:56 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:15:56 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:15:56 AM	Tube furnace set to 0
11/8/2011	7:16:35 AM	Run aborted at 7:16 AM
11/8/2011	7:16:35 AM	Helium valve closed
11/8/2011	7:16:35 AM	H2 valve closed
11/8/2011	7:16:35 AM	BCl3 valve closed
11/8/2011	7:16:35 AM	PH3 valve closed
11/8/2011	7:16:35 AM	SiCl4 pre valve closed
11/8/2011	7:16:35 AM	SiCl4 post valve closed
11/8/2011	7:16:35 AM	Bypass valve closed
11/8/2011	7:16:35 AM	Main Vac valve closed
11/8/2011	7:16:35 AM	Bubbler valve closed
11/8/2011	7:16:35 AM	Helium MFC set to  0.000000
11/8/2011	7:16:35 AM	H2 MFC set to  0.000000
11/8/2011	7:16:35 AM	BCl3 MFC set to  0.000000
11/8/2011	7:16:35 AM	PHl3 MFC set to  0.000000
11/8/2011	7:16:35 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:16:35 AM	Tube furnace set to 0
11/8/2011	7:16:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:16:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:16:47 AM	Recipe started at 7:16 AM
11/8/2011	7:16:47 AM	Helium valve closed
11/8/2011	7:16:47 AM	H2 valve closed
11/8/2011	7:16:47 AM	BCl3 valve closed
11/8/2011	7:16:47 AM	PH3 valve closed
11/8/2011	7:16:47 AM	SiCl4 pre valve closed
11/8/2011	7:16:47 AM	SiCl4 post valve closed
11/8/2011	7:16:47 AM	Main Vac valve closed
11/8/2011	7:16:47 AM	Bubbler valve closed
11/8/2011	7:16:47 AM	Bypass valve opened
11/8/2011	7:16:47 AM	Helium MFC set to  0.000000
11/8/2011	7:16:47 AM	H2 MFC set to  0.000000
11/8/2011	7:16:47 AM	BCl3 MFC set to  0.000000
11/8/2011	7:16:47 AM	PHl3 MFC set to  0.000000
11/8/2011	7:16:47 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:16:47 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:16:47 AM	Tube furnace set to 0
11/8/2011	7:16:47 AM	Helium valve closed
11/8/2011	7:16:47 AM	H2 valve closed
11/8/2011	7:16:47 AM	BCl3 valve closed
11/8/2011	7:16:47 AM	PH3 valve closed
11/8/2011	7:16:47 AM	SiCl4 pre valve closed
11/8/2011	7:16:47 AM	SiCl4 post valve closed
11/8/2011	7:16:47 AM	Main Vac valve closed
11/8/2011	7:16:47 AM	Bubbler valve closed
11/8/2011	7:16:47 AM	Bypass valve opened
11/8/2011	7:16:47 AM	Helium MFC set to  0.000000
11/8/2011	7:16:47 AM	H2 MFC set to  0.000000
11/8/2011	7:16:47 AM	BCl3 MFC set to  0.000000
11/8/2011	7:16:47 AM	PHl3 MFC set to  0.000000
11/8/2011	7:16:47 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:16:47 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:16:47 AM	Tube furnace set to 0
11/8/2011	7:16:52 AM	Helium valve closed
11/8/2011	7:16:52 AM	H2 valve closed
11/8/2011	7:16:52 AM	BCl3 valve closed
11/8/2011	7:16:52 AM	PH3 valve closed
11/8/2011	7:16:52 AM	SiCl4 pre valve closed
11/8/2011	7:16:52 AM	SiCl4 post valve closed
11/8/2011	7:16:52 AM	Bypass valve closed
11/8/2011	7:16:52 AM	Bubbler valve closed
11/8/2011	7:16:52 AM	Main Vac valve opened
11/8/2011	7:16:52 AM	Helium MFC set to  0.000000
11/8/2011	7:16:52 AM	H2 MFC set to  0.000000
11/8/2011	7:16:52 AM	BCl3 MFC set to  0.000000
11/8/2011	7:16:52 AM	PHl3 MFC set to  0.000000
11/8/2011	7:16:52 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:16:52 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:16:52 AM	Tube furnace set to 0
11/8/2011	7:16:53 AM	Run finished at 7:16 AM
11/8/2011	7:16:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:22:23 AM	Main Vac valve closed
11/8/2011	7:24:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:24:29 AM	Recipe started at 7:24 AM
11/8/2011	7:24:29 AM	Helium valve closed
11/8/2011	7:24:29 AM	H2 valve closed
11/8/2011	7:24:29 AM	BCl3 valve closed
11/8/2011	7:24:29 AM	PH3 valve closed
11/8/2011	7:24:29 AM	SiCl4 pre valve closed
11/8/2011	7:24:29 AM	SiCl4 post valve closed
11/8/2011	7:24:29 AM	Main Vac valve closed
11/8/2011	7:24:29 AM	Bubbler valve closed
11/8/2011	7:24:29 AM	Bypass valve opened
11/8/2011	7:24:29 AM	Helium MFC set to  0.000000
11/8/2011	7:24:29 AM	H2 MFC set to  0.000000
11/8/2011	7:24:29 AM	BCl3 MFC set to  0.000000
11/8/2011	7:24:29 AM	PHl3 MFC set to  0.000000
11/8/2011	7:24:29 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:24:29 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:24:29 AM	Tube furnace set to 0
11/8/2011	7:26:25 AM	Helium valve closed
11/8/2011	7:26:25 AM	H2 valve closed
11/8/2011	7:26:25 AM	BCl3 valve closed
11/8/2011	7:26:25 AM	PH3 valve closed
11/8/2011	7:26:25 AM	SiCl4 pre valve closed
11/8/2011	7:26:25 AM	SiCl4 post valve closed
11/8/2011	7:26:25 AM	Main Vac valve closed
11/8/2011	7:26:25 AM	Bubbler valve closed
11/8/2011	7:26:25 AM	Bypass valve opened
11/8/2011	7:26:25 AM	Helium MFC set to  0.000000
11/8/2011	7:26:25 AM	H2 MFC set to  0.000000
11/8/2011	7:26:25 AM	BCl3 MFC set to  0.000000
11/8/2011	7:26:25 AM	PHl3 MFC set to  0.000000
11/8/2011	7:26:25 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:26:25 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:26:25 AM	Tube furnace set to 0
11/8/2011	7:26:29 AM	Helium valve closed
11/8/2011	7:26:29 AM	H2 valve closed
11/8/2011	7:26:29 AM	BCl3 valve closed
11/8/2011	7:26:29 AM	PH3 valve closed
11/8/2011	7:26:29 AM	SiCl4 pre valve closed
11/8/2011	7:26:29 AM	SiCl4 post valve closed
11/8/2011	7:26:29 AM	Bypass valve closed
11/8/2011	7:26:29 AM	Bubbler valve closed
11/8/2011	7:26:29 AM	Main Vac valve opened
11/8/2011	7:26:29 AM	Helium MFC set to  0.000000
11/8/2011	7:26:29 AM	H2 MFC set to  0.000000
11/8/2011	7:26:29 AM	BCl3 MFC set to  0.000000
11/8/2011	7:26:29 AM	PHl3 MFC set to  0.000000
11/8/2011	7:26:29 AM	SiCl4 MFC set to  0.000000
11/8/2011	7:26:29 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:26:30 AM	Tube furnace set to 0
11/8/2011	7:26:31 AM	Run finished at 7:26 AM
11/8/2011	7:26:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:57:55 AM	Main Vac valve closed
11/8/2011	7:58:00 AM	Helium MFC set to  100.000000
11/8/2011	7:58:01 AM	Helium valve opened
11/8/2011	7:58:11 AM	Helium MFC set to  500.000000
11/8/2011	7:58:22 AM	Helium valve closed
11/8/2011	7:58:23 AM	Bypass valve opened
11/8/2011	7:58:30 AM	Helium MFC set to  0.000000
11/8/2011	7:59:25 AM	Bypass valve closed
11/8/2011	7:59:25 AM	Main Vac valve opened
11/8/2011	8:07:54 AM	Main Vac valve closed
11/8/2011	8:07:58 AM	Helium MFC set to  500.000000
11/8/2011	8:07:59 AM	Helium valve opened
11/8/2011	8:08:54 AM	Helium valve closed
11/8/2011	8:08:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	8:08:57 AM	Recipe started at 8:08 AM
11/8/2011	8:08:57 AM	Helium valve closed
11/8/2011	8:08:57 AM	H2 valve closed
11/8/2011	8:08:57 AM	BCl3 valve closed
11/8/2011	8:08:57 AM	PH3 valve closed
11/8/2011	8:08:57 AM	SiCl4 pre valve closed
11/8/2011	8:08:57 AM	SiCl4 post valve closed
11/8/2011	8:08:57 AM	Main Vac valve closed
11/8/2011	8:08:57 AM	Bubbler valve closed
11/8/2011	8:08:57 AM	Bypass valve opened
11/8/2011	8:08:57 AM	Helium MFC set to  0.000000
11/8/2011	8:08:57 AM	H2 MFC set to  0.000000
11/8/2011	8:08:57 AM	BCl3 MFC set to  0.000000
11/8/2011	8:08:57 AM	PHl3 MFC set to  0.000000
11/8/2011	8:08:57 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:08:57 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:08:57 AM	Tube furnace set to 0
11/8/2011	8:09:56 AM	Helium valve closed
11/8/2011	8:09:56 AM	H2 valve closed
11/8/2011	8:09:56 AM	BCl3 valve closed
11/8/2011	8:09:56 AM	PH3 valve closed
11/8/2011	8:09:56 AM	SiCl4 pre valve closed
11/8/2011	8:09:56 AM	SiCl4 post valve closed
11/8/2011	8:09:56 AM	Main Vac valve closed
11/8/2011	8:09:56 AM	Bubbler valve closed
11/8/2011	8:09:56 AM	Bypass valve opened
11/8/2011	8:09:56 AM	Helium MFC set to  0.000000
11/8/2011	8:09:56 AM	H2 MFC set to  0.000000
11/8/2011	8:09:56 AM	BCl3 MFC set to  0.000000
11/8/2011	8:09:56 AM	PHl3 MFC set to  0.000000
11/8/2011	8:09:56 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:09:56 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:09:56 AM	Tube furnace set to 0
11/8/2011	8:10:52 AM	Helium valve closed
11/8/2011	8:10:52 AM	H2 valve closed
11/8/2011	8:10:52 AM	BCl3 valve closed
11/8/2011	8:10:52 AM	PH3 valve closed
11/8/2011	8:10:52 AM	SiCl4 pre valve closed
11/8/2011	8:10:52 AM	SiCl4 post valve closed
11/8/2011	8:10:52 AM	Bypass valve closed
11/8/2011	8:10:52 AM	Bubbler valve closed
11/8/2011	8:10:52 AM	Main Vac valve opened
11/8/2011	8:10:52 AM	Helium MFC set to  0.000000
11/8/2011	8:10:52 AM	H2 MFC set to  0.000000
11/8/2011	8:10:52 AM	BCl3 MFC set to  0.000000
11/8/2011	8:10:52 AM	PHl3 MFC set to  0.000000
11/8/2011	8:10:52 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:10:52 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:10:52 AM	Tube furnace set to 0
11/8/2011	8:10:53 AM	Run finished at 8:10 AM
11/8/2011	8:10:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	8:17:25 AM	Main Vac valve closed
11/8/2011	8:18:01 AM	Main Vac valve opened
11/8/2011	8:21:48 AM	Recipe started at 8:21 AM
11/8/2011	8:21:48 AM	Helium valve closed
11/8/2011	8:21:48 AM	H2 valve closed
11/8/2011	8:21:48 AM	BCl3 valve closed
11/8/2011	8:21:48 AM	PH3 valve closed
11/8/2011	8:21:48 AM	SiCl4 pre valve closed
11/8/2011	8:21:48 AM	SiCl4 post valve closed
11/8/2011	8:21:48 AM	Main Vac valve closed
11/8/2011	8:21:48 AM	Bypass valve closed
11/8/2011	8:21:48 AM	Bubbler valve closed
11/8/2011	8:21:48 AM	Helium MFC set to  0.000000
11/8/2011	8:21:48 AM	H2 MFC set to  0.000000
11/8/2011	8:21:48 AM	BCl3 MFC set to  0.000000
11/8/2011	8:21:48 AM	PHl3 MFC set to  0.000000
11/8/2011	8:21:48 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:21:48 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:21:48 AM	Tube furnace set to 0
11/8/2011	8:21:51 AM	Helium valve closed
11/8/2011	8:21:51 AM	BCl3 valve closed
11/8/2011	8:21:51 AM	PH3 valve closed
11/8/2011	8:21:51 AM	SiCl4 pre valve closed
11/8/2011	8:21:51 AM	SiCl4 post valve closed
11/8/2011	8:21:51 AM	Main Vac valve closed
11/8/2011	8:21:51 AM	Bypass valve closed
11/8/2011	8:21:51 AM	Bubbler valve closed
11/8/2011	8:21:51 AM	H2 valve opened
11/8/2011	8:21:51 AM	Helium MFC set to  0.000000
11/8/2011	8:21:51 AM	H2 MFC set to  500.000000
11/8/2011	8:21:51 AM	BCl3 MFC set to  0.000000
11/8/2011	8:21:51 AM	PHl3 MFC set to  0.000000
11/8/2011	8:21:51 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:21:51 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:21:51 AM	Tube furnace set to 100
11/8/2011	8:22:59 AM	Helium valve closed
11/8/2011	8:22:59 AM	BCl3 valve closed
11/8/2011	8:22:59 AM	PH3 valve closed
11/8/2011	8:22:59 AM	SiCl4 pre valve closed
11/8/2011	8:22:59 AM	SiCl4 post valve closed
11/8/2011	8:22:59 AM	Main Vac valve closed
11/8/2011	8:22:59 AM	Bypass valve closed
11/8/2011	8:22:59 AM	H2 valve opened
11/8/2011	8:22:59 AM	Bubbler valve opened
11/8/2011	8:22:59 AM	Helium MFC set to  0.000000
11/8/2011	8:22:59 AM	H2 MFC set to  500.000000
11/8/2011	8:22:59 AM	BCl3 MFC set to  0.000000
11/8/2011	8:22:59 AM	PHl3 MFC set to  0.000000
11/8/2011	8:22:59 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:22:59 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:22:59 AM	Tube furnace set to 1000
11/8/2011	8:23:00 AM	Helium valve closed
11/8/2011	8:23:00 AM	BCl3 valve closed
11/8/2011	8:23:00 AM	PH3 valve closed
11/8/2011	8:23:00 AM	SiCl4 pre valve closed
11/8/2011	8:23:00 AM	SiCl4 post valve closed
11/8/2011	8:23:00 AM	Main Vac valve closed
11/8/2011	8:23:00 AM	Bypass valve closed
11/8/2011	8:23:00 AM	H2 valve opened
11/8/2011	8:23:00 AM	Bubbler valve opened
11/8/2011	8:23:00 AM	Helium MFC set to  0.000000
11/8/2011	8:23:00 AM	H2 MFC set to  500.000000
11/8/2011	8:23:00 AM	BCl3 MFC set to  0.000000
11/8/2011	8:23:00 AM	PHl3 MFC set to  0.000000
11/8/2011	8:23:00 AM	SiCl4 MFC set to  0.000000
11/8/2011	8:23:00 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:23:00 AM	Tube furnace set to 1000
11/8/2011	8:45:00 AM	Helium valve closed
11/8/2011	8:45:00 AM	BCl3 valve closed
11/8/2011	8:45:00 AM	PH3 valve closed
11/8/2011	8:45:00 AM	Main Vac valve closed
11/8/2011	8:45:00 AM	Bypass valve closed
11/8/2011	8:45:00 AM	H2 valve opened
11/8/2011	8:45:00 AM	SiCl4 pre valve opened
11/8/2011	8:45:00 AM	SiCl4 post valve opened
11/8/2011	8:45:00 AM	Bubbler valve opened
11/8/2011	8:45:00 AM	Helium MFC set to  0.000000
11/8/2011	8:45:00 AM	H2 MFC set to  500.000000
11/8/2011	8:45:00 AM	BCl3 MFC set to  0.000000
11/8/2011	8:45:00 AM	PHl3 MFC set to  0.000000
11/8/2011	8:45:00 AM	SiCl4 MFC set to  17.000000
11/8/2011	8:45:00 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	8:45:00 AM	Tube furnace set to 1000
11/8/2011	9:05:00 AM	Helium valve closed
11/8/2011	9:05:00 AM	BCl3 valve closed
11/8/2011	9:05:00 AM	PH3 valve closed
11/8/2011	9:05:00 AM	SiCl4 pre valve closed
11/8/2011	9:05:00 AM	SiCl4 post valve closed
11/8/2011	9:05:00 AM	Main Vac valve closed
11/8/2011	9:05:00 AM	Bypass valve closed
11/8/2011	9:05:00 AM	H2 valve opened
11/8/2011	9:05:00 AM	Bubbler valve opened
11/8/2011	9:05:00 AM	Helium MFC set to  0.000000
11/8/2011	9:05:00 AM	H2 MFC set to  500.000000
11/8/2011	9:05:00 AM	BCl3 MFC set to  0.000000
11/8/2011	9:05:00 AM	PHl3 MFC set to  0.000000
11/8/2011	9:05:00 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:05:00 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:05:00 AM	Tube furnace set to 950
11/8/2011	9:10:00 AM	Helium valve closed
11/8/2011	9:10:00 AM	BCl3 valve closed
11/8/2011	9:10:00 AM	PH3 valve closed
11/8/2011	9:10:00 AM	SiCl4 pre valve closed
11/8/2011	9:10:00 AM	SiCl4 post valve closed
11/8/2011	9:10:00 AM	Main Vac valve closed
11/8/2011	9:10:00 AM	Bypass valve closed
11/8/2011	9:10:00 AM	H2 valve opened
11/8/2011	9:10:00 AM	Bubbler valve opened
11/8/2011	9:10:00 AM	Helium MFC set to  0.000000
11/8/2011	9:10:00 AM	H2 MFC set to  500.000000
11/8/2011	9:10:00 AM	BCl3 MFC set to  0.000000
11/8/2011	9:10:00 AM	PHl3 MFC set to  0.000000
11/8/2011	9:10:00 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:10:00 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:10:01 AM	Tube furnace set to 750
11/8/2011	9:15:01 AM	Helium valve closed
11/8/2011	9:15:01 AM	BCl3 valve closed
11/8/2011	9:15:01 AM	PH3 valve closed
11/8/2011	9:15:01 AM	SiCl4 pre valve closed
11/8/2011	9:15:01 AM	SiCl4 post valve closed
11/8/2011	9:15:01 AM	Main Vac valve closed
11/8/2011	9:15:01 AM	Bypass valve closed
11/8/2011	9:15:01 AM	H2 valve opened
11/8/2011	9:15:01 AM	Bubbler valve opened
11/8/2011	9:15:01 AM	Helium MFC set to  0.000000
11/8/2011	9:15:01 AM	H2 MFC set to  500.000000
11/8/2011	9:15:01 AM	BCl3 MFC set to  0.000000
11/8/2011	9:15:01 AM	PHl3 MFC set to  0.000000
11/8/2011	9:15:01 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:15:01 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:15:01 AM	Tube furnace set to 750
11/8/2011	9:19:09 AM	H2 valve closed
11/8/2011	9:19:09 AM	BCl3 valve closed
11/8/2011	9:19:09 AM	PH3 valve closed
11/8/2011	9:19:09 AM	SiCl4 pre valve closed
11/8/2011	9:19:09 AM	SiCl4 post valve closed
11/8/2011	9:19:09 AM	Main Vac valve closed
11/8/2011	9:19:09 AM	Bypass valve closed
11/8/2011	9:19:09 AM	Helium valve opened
11/8/2011	9:19:09 AM	Bubbler valve opened
11/8/2011	9:19:09 AM	Helium MFC set to  400.000000
11/8/2011	9:19:09 AM	H2 MFC set to  0.000000
11/8/2011	9:19:09 AM	BCl3 MFC set to  0.000000
11/8/2011	9:19:09 AM	PHl3 MFC set to  0.000000
11/8/2011	9:19:09 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:19:09 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:19:09 AM	Tube furnace set to 0
11/8/2011	9:25:51 AM	Run aborted at 9:25 AM
11/8/2011	9:25:51 AM	Helium valve closed
11/8/2011	9:25:51 AM	H2 valve closed
11/8/2011	9:25:51 AM	BCl3 valve closed
11/8/2011	9:25:51 AM	PH3 valve closed
11/8/2011	9:25:52 AM	SiCl4 pre valve closed
11/8/2011	9:25:52 AM	SiCl4 post valve closed
11/8/2011	9:25:52 AM	Bypass valve closed
11/8/2011	9:25:52 AM	Main Vac valve closed
11/8/2011	9:25:52 AM	Bubbler valve closed
11/8/2011	9:25:52 AM	Helium MFC set to  0.000000
11/8/2011	9:25:52 AM	H2 MFC set to  0.000000
11/8/2011	9:25:52 AM	BCl3 MFC set to  0.000000
11/8/2011	9:25:52 AM	PHl3 MFC set to  0.000000
11/8/2011	9:25:52 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:25:52 AM	Tube furnace set to 0
11/8/2011	9:28:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	9:28:59 AM	Recipe started at 9:28 AM
11/8/2011	9:28:59 AM	Helium valve closed
11/8/2011	9:28:59 AM	H2 valve closed
11/8/2011	9:28:59 AM	BCl3 valve closed
11/8/2011	9:28:59 AM	PH3 valve closed
11/8/2011	9:28:59 AM	SiCl4 pre valve closed
11/8/2011	9:28:59 AM	SiCl4 post valve closed
11/8/2011	9:28:59 AM	Main Vac valve closed
11/8/2011	9:28:59 AM	Bubbler valve closed
11/8/2011	9:28:59 AM	Bypass valve opened
11/8/2011	9:28:59 AM	Helium MFC set to  0.000000
11/8/2011	9:28:59 AM	H2 MFC set to  0.000000
11/8/2011	9:28:59 AM	BCl3 MFC set to  0.000000
11/8/2011	9:28:59 AM	PHl3 MFC set to  0.000000
11/8/2011	9:28:59 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:28:59 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:28:59 AM	Tube furnace set to 0
11/8/2011	9:30:02 AM	Helium valve closed
11/8/2011	9:30:02 AM	H2 valve closed
11/8/2011	9:30:02 AM	BCl3 valve closed
11/8/2011	9:30:02 AM	PH3 valve closed
11/8/2011	9:30:02 AM	SiCl4 pre valve closed
11/8/2011	9:30:02 AM	SiCl4 post valve closed
11/8/2011	9:30:02 AM	Main Vac valve closed
11/8/2011	9:30:02 AM	Bubbler valve closed
11/8/2011	9:30:02 AM	Bypass valve opened
11/8/2011	9:30:02 AM	Helium MFC set to  0.000000
11/8/2011	9:30:02 AM	H2 MFC set to  0.000000
11/8/2011	9:30:02 AM	BCl3 MFC set to  0.000000
11/8/2011	9:30:02 AM	PHl3 MFC set to  0.000000
11/8/2011	9:30:02 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:30:02 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:30:02 AM	Tube furnace set to 0
11/8/2011	9:31:02 AM	Helium valve closed
11/8/2011	9:31:02 AM	H2 valve closed
11/8/2011	9:31:02 AM	BCl3 valve closed
11/8/2011	9:31:02 AM	PH3 valve closed
11/8/2011	9:31:02 AM	SiCl4 pre valve closed
11/8/2011	9:31:02 AM	SiCl4 post valve closed
11/8/2011	9:31:02 AM	Bypass valve closed
11/8/2011	9:31:02 AM	Bubbler valve closed
11/8/2011	9:31:02 AM	Main Vac valve opened
11/8/2011	9:31:02 AM	Helium MFC set to  0.000000
11/8/2011	9:31:02 AM	H2 MFC set to  0.000000
11/8/2011	9:31:02 AM	BCl3 MFC set to  0.000000
11/8/2011	9:31:02 AM	PHl3 MFC set to  0.000000
11/8/2011	9:31:02 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:31:02 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:31:02 AM	Tube furnace set to 0
11/8/2011	9:31:03 AM	Run finished at 9:31 AM
11/8/2011	9:31:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	9:47:12 AM	Main Vac valve closed
11/8/2011	9:50:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	9:50:21 AM	Recipe started at 9:50 AM
11/8/2011	9:50:21 AM	Helium valve closed
11/8/2011	9:50:21 AM	H2 valve closed
11/8/2011	9:50:21 AM	BCl3 valve closed
11/8/2011	9:50:21 AM	PH3 valve closed
11/8/2011	9:50:21 AM	SiCl4 pre valve closed
11/8/2011	9:50:21 AM	SiCl4 post valve closed
11/8/2011	9:50:21 AM	Main Vac valve closed
11/8/2011	9:50:21 AM	Bubbler valve closed
11/8/2011	9:50:21 AM	Bypass valve opened
11/8/2011	9:50:21 AM	Helium MFC set to  0.000000
11/8/2011	9:50:21 AM	H2 MFC set to  0.000000
11/8/2011	9:50:21 AM	BCl3 MFC set to  0.000000
11/8/2011	9:50:21 AM	PHl3 MFC set to  0.000000
11/8/2011	9:50:21 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:50:21 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:50:21 AM	Tube furnace set to 0
11/8/2011	9:52:20 AM	Helium valve closed
11/8/2011	9:52:20 AM	H2 valve closed
11/8/2011	9:52:20 AM	BCl3 valve closed
11/8/2011	9:52:20 AM	PH3 valve closed
11/8/2011	9:52:20 AM	SiCl4 pre valve closed
11/8/2011	9:52:20 AM	SiCl4 post valve closed
11/8/2011	9:52:20 AM	Main Vac valve closed
11/8/2011	9:52:20 AM	Bubbler valve closed
11/8/2011	9:52:20 AM	Bypass valve opened
11/8/2011	9:52:20 AM	Helium MFC set to  0.000000
11/8/2011	9:52:20 AM	H2 MFC set to  0.000000
11/8/2011	9:52:20 AM	BCl3 MFC set to  0.000000
11/8/2011	9:52:20 AM	PHl3 MFC set to  0.000000
11/8/2011	9:52:20 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:52:20 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:52:20 AM	Tube furnace set to 0
11/8/2011	9:53:20 AM	Helium valve closed
11/8/2011	9:53:20 AM	H2 valve closed
11/8/2011	9:53:20 AM	BCl3 valve closed
11/8/2011	9:53:20 AM	PH3 valve closed
11/8/2011	9:53:20 AM	SiCl4 pre valve closed
11/8/2011	9:53:20 AM	SiCl4 post valve closed
11/8/2011	9:53:20 AM	Bypass valve closed
11/8/2011	9:53:20 AM	Bubbler valve closed
11/8/2011	9:53:20 AM	Main Vac valve opened
11/8/2011	9:53:20 AM	Helium MFC set to  0.000000
11/8/2011	9:53:20 AM	H2 MFC set to  0.000000
11/8/2011	9:53:20 AM	BCl3 MFC set to  0.000000
11/8/2011	9:53:20 AM	PHl3 MFC set to  0.000000
11/8/2011	9:53:20 AM	SiCl4 MFC set to  0.000000
11/8/2011	9:53:20 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	9:53:20 AM	Tube furnace set to 0
11/8/2011	9:53:21 AM	Run finished at 9:53 AM
11/8/2011	9:53:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	11:12:08 AM	Recipe started at 11:12 AM
11/8/2011	11:12:08 AM	Helium valve closed
11/8/2011	11:12:08 AM	H2 valve closed
11/8/2011	11:12:08 AM	BCl3 valve closed
11/8/2011	11:12:08 AM	PH3 valve closed
11/8/2011	11:12:08 AM	SiCl4 pre valve closed
11/8/2011	11:12:08 AM	SiCl4 post valve closed
11/8/2011	11:12:08 AM	Main Vac valve closed
11/8/2011	11:12:08 AM	Bypass valve closed
11/8/2011	11:12:08 AM	Bubbler valve closed
11/8/2011	11:12:08 AM	Helium MFC set to  0.000000
11/8/2011	11:12:08 AM	H2 MFC set to  0.000000
11/8/2011	11:12:08 AM	BCl3 MFC set to  0.000000
11/8/2011	11:12:08 AM	PHl3 MFC set to  0.000000
11/8/2011	11:12:08 AM	SiCl4 MFC set to  0.000000
11/8/2011	11:12:08 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:12:08 AM	Tube furnace set to 0
11/8/2011	11:12:11 AM	Helium valve closed
11/8/2011	11:12:11 AM	BCl3 valve closed
11/8/2011	11:12:11 AM	PH3 valve closed
11/8/2011	11:12:11 AM	SiCl4 pre valve closed
11/8/2011	11:12:11 AM	SiCl4 post valve closed
11/8/2011	11:12:11 AM	Main Vac valve closed
11/8/2011	11:12:11 AM	Bypass valve closed
11/8/2011	11:12:11 AM	Bubbler valve closed
11/8/2011	11:12:11 AM	H2 valve opened
11/8/2011	11:12:11 AM	Helium MFC set to  0.000000
11/8/2011	11:12:11 AM	H2 MFC set to  500.000000
11/8/2011	11:12:11 AM	BCl3 MFC set to  0.000000
11/8/2011	11:12:11 AM	PHl3 MFC set to  0.000000
11/8/2011	11:12:11 AM	SiCl4 MFC set to  0.000000
11/8/2011	11:12:11 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:12:11 AM	Tube furnace set to 100
11/8/2011	11:13:19 AM	Helium valve closed
11/8/2011	11:13:19 AM	BCl3 valve closed
11/8/2011	11:13:19 AM	PH3 valve closed
11/8/2011	11:13:19 AM	SiCl4 pre valve closed
11/8/2011	11:13:19 AM	SiCl4 post valve closed
11/8/2011	11:13:19 AM	Main Vac valve closed
11/8/2011	11:13:19 AM	Bypass valve closed
11/8/2011	11:13:19 AM	H2 valve opened
11/8/2011	11:13:19 AM	Bubbler valve opened
11/8/2011	11:13:19 AM	Helium MFC set to  0.000000
11/8/2011	11:13:19 AM	H2 MFC set to  500.000000
11/8/2011	11:13:19 AM	BCl3 MFC set to  0.000000
11/8/2011	11:13:19 AM	PHl3 MFC set to  0.000000
11/8/2011	11:13:19 AM	SiCl4 MFC set to  0.000000
11/8/2011	11:13:19 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:13:19 AM	Tube furnace set to 1000
11/8/2011	11:13:20 AM	Helium valve closed
11/8/2011	11:13:20 AM	BCl3 valve closed
11/8/2011	11:13:20 AM	PH3 valve closed
11/8/2011	11:13:20 AM	SiCl4 pre valve closed
11/8/2011	11:13:20 AM	SiCl4 post valve closed
11/8/2011	11:13:20 AM	Main Vac valve closed
11/8/2011	11:13:20 AM	Bypass valve closed
11/8/2011	11:13:20 AM	H2 valve opened
11/8/2011	11:13:20 AM	Bubbler valve opened
11/8/2011	11:13:20 AM	Helium MFC set to  0.000000
11/8/2011	11:13:20 AM	H2 MFC set to  500.000000
11/8/2011	11:13:20 AM	BCl3 MFC set to  0.000000
11/8/2011	11:13:20 AM	PHl3 MFC set to  0.000000
11/8/2011	11:13:20 AM	SiCl4 MFC set to  0.000000
11/8/2011	11:13:20 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:13:21 AM	Tube furnace set to 1000
11/8/2011	11:35:20 AM	Helium valve closed
11/8/2011	11:35:20 AM	BCl3 valve closed
11/8/2011	11:35:20 AM	PH3 valve closed
11/8/2011	11:35:20 AM	Main Vac valve closed
11/8/2011	11:35:20 AM	Bypass valve closed
11/8/2011	11:35:20 AM	H2 valve opened
11/8/2011	11:35:21 AM	SiCl4 pre valve opened
11/8/2011	11:35:21 AM	SiCl4 post valve opened
11/8/2011	11:35:21 AM	Bubbler valve opened
11/8/2011	11:35:21 AM	Helium MFC set to  0.000000
11/8/2011	11:35:21 AM	H2 MFC set to  500.000000
11/8/2011	11:35:21 AM	BCl3 MFC set to  0.000000
11/8/2011	11:35:21 AM	PHl3 MFC set to  0.000000
11/8/2011	11:35:21 AM	SiCl4 MFC set to  20.000000
11/8/2011	11:35:21 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:35:21 AM	Tube furnace set to 1000
11/8/2011	11:55:21 AM	Helium valve closed
11/8/2011	11:55:21 AM	BCl3 valve closed
11/8/2011	11:55:21 AM	PH3 valve closed
11/8/2011	11:55:21 AM	SiCl4 pre valve closed
11/8/2011	11:55:21 AM	SiCl4 post valve closed
11/8/2011	11:55:21 AM	Main Vac valve closed
11/8/2011	11:55:21 AM	Bypass valve closed
11/8/2011	11:55:21 AM	H2 valve opened
11/8/2011	11:55:21 AM	Bubbler valve opened
11/8/2011	11:55:21 AM	Helium MFC set to  0.000000
11/8/2011	11:55:21 AM	H2 MFC set to  500.000000
11/8/2011	11:55:21 AM	BCl3 MFC set to  0.000000
11/8/2011	11:55:21 AM	PHl3 MFC set to  0.000000
11/8/2011	11:55:21 AM	SiCl4 MFC set to  0.000000
11/8/2011	11:55:21 AM	Bypass solenoid MFC set to  0.000000
11/8/2011	11:55:21 AM	Tube furnace set to 950
11/8/2011	12:00:21 PM	Helium valve closed
11/8/2011	12:00:21 PM	BCl3 valve closed
11/8/2011	12:00:21 PM	PH3 valve closed
11/8/2011	12:00:21 PM	SiCl4 pre valve closed
11/8/2011	12:00:21 PM	SiCl4 post valve closed
11/8/2011	12:00:21 PM	Main Vac valve closed
11/8/2011	12:00:21 PM	Bypass valve closed
11/8/2011	12:00:21 PM	H2 valve opened
11/8/2011	12:00:21 PM	Bubbler valve opened
11/8/2011	12:00:21 PM	Helium MFC set to  0.000000
11/8/2011	12:00:21 PM	H2 MFC set to  500.000000
11/8/2011	12:00:21 PM	BCl3 MFC set to  0.000000
11/8/2011	12:00:21 PM	PHl3 MFC set to  0.000000
11/8/2011	12:00:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:00:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:00:21 PM	Tube furnace set to 750
11/8/2011	12:05:21 PM	Helium valve closed
11/8/2011	12:05:21 PM	BCl3 valve closed
11/8/2011	12:05:21 PM	PH3 valve closed
11/8/2011	12:05:21 PM	SiCl4 pre valve closed
11/8/2011	12:05:21 PM	SiCl4 post valve closed
11/8/2011	12:05:21 PM	Main Vac valve closed
11/8/2011	12:05:21 PM	Bypass valve closed
11/8/2011	12:05:21 PM	H2 valve opened
11/8/2011	12:05:21 PM	Bubbler valve opened
11/8/2011	12:05:21 PM	Helium MFC set to  0.000000
11/8/2011	12:05:21 PM	H2 MFC set to  500.000000
11/8/2011	12:05:21 PM	BCl3 MFC set to  0.000000
11/8/2011	12:05:21 PM	PHl3 MFC set to  0.000000
11/8/2011	12:05:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:05:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:05:21 PM	Tube furnace set to 750
11/8/2011	12:10:21 PM	H2 valve closed
11/8/2011	12:10:21 PM	BCl3 valve closed
11/8/2011	12:10:21 PM	PH3 valve closed
11/8/2011	12:10:21 PM	SiCl4 pre valve closed
11/8/2011	12:10:21 PM	SiCl4 post valve closed
11/8/2011	12:10:21 PM	Main Vac valve closed
11/8/2011	12:10:21 PM	Bypass valve closed
11/8/2011	12:10:21 PM	Helium valve opened
11/8/2011	12:10:21 PM	Bubbler valve opened
11/8/2011	12:10:21 PM	Helium MFC set to  400.000000
11/8/2011	12:10:21 PM	H2 MFC set to  0.000000
11/8/2011	12:10:21 PM	BCl3 MFC set to  0.000000
11/8/2011	12:10:21 PM	PHl3 MFC set to  0.000000
11/8/2011	12:10:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:10:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:10:21 PM	Tube furnace set to 0
11/8/2011	12:40:21 PM	Helium valve closed
11/8/2011	12:40:21 PM	H2 valve closed
11/8/2011	12:40:21 PM	BCl3 valve closed
11/8/2011	12:40:21 PM	PH3 valve closed
11/8/2011	12:40:21 PM	SiCl4 pre valve closed
11/8/2011	12:40:21 PM	SiCl4 post valve closed
11/8/2011	12:40:21 PM	Main Vac valve closed
11/8/2011	12:40:21 PM	Bypass valve closed
11/8/2011	12:40:21 PM	Bubbler valve closed
11/8/2011	12:40:21 PM	Helium MFC set to  0.000000
11/8/2011	12:40:21 PM	H2 MFC set to  0.000000
11/8/2011	12:40:21 PM	BCl3 MFC set to  0.000000
11/8/2011	12:40:21 PM	PHl3 MFC set to  0.000000
11/8/2011	12:40:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:40:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:40:21 PM	Tube furnace set to 0
11/8/2011	12:45:21 PM	Helium valve closed
11/8/2011	12:45:21 PM	H2 valve closed
11/8/2011	12:45:21 PM	BCl3 valve closed
11/8/2011	12:45:21 PM	PH3 valve closed
11/8/2011	12:45:21 PM	SiCl4 pre valve closed
11/8/2011	12:45:21 PM	SiCl4 post valve closed
11/8/2011	12:45:21 PM	Main Vac valve closed
11/8/2011	12:45:21 PM	Bubbler valve closed
11/8/2011	12:45:21 PM	Bypass valve opened
11/8/2011	12:45:21 PM	Helium MFC set to  0.000000
11/8/2011	12:45:21 PM	H2 MFC set to  0.000000
11/8/2011	12:45:21 PM	BCl3 MFC set to  0.000000
11/8/2011	12:45:21 PM	PHl3 MFC set to  0.000000
11/8/2011	12:45:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:45:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:45:22 PM	Tube furnace set to 0
11/8/2011	12:46:18 PM	Helium valve closed
11/8/2011	12:46:18 PM	H2 valve closed
11/8/2011	12:46:18 PM	BCl3 valve closed
11/8/2011	12:46:18 PM	PH3 valve closed
11/8/2011	12:46:18 PM	SiCl4 pre valve closed
11/8/2011	12:46:18 PM	SiCl4 post valve closed
11/8/2011	12:46:18 PM	Main Vac valve closed
11/8/2011	12:46:18 PM	Bubbler valve closed
11/8/2011	12:46:18 PM	Bypass valve opened
11/8/2011	12:46:18 PM	Helium MFC set to  0.000000
11/8/2011	12:46:18 PM	H2 MFC set to  0.000000
11/8/2011	12:46:18 PM	BCl3 MFC set to  0.000000
11/8/2011	12:46:18 PM	PHl3 MFC set to  0.000000
11/8/2011	12:46:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:46:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:46:18 PM	Tube furnace set to 0
11/8/2011	12:49:18 PM	Helium valve closed
11/8/2011	12:49:18 PM	H2 valve closed
11/8/2011	12:49:18 PM	BCl3 valve closed
11/8/2011	12:49:18 PM	PH3 valve closed
11/8/2011	12:49:18 PM	SiCl4 pre valve closed
11/8/2011	12:49:18 PM	SiCl4 post valve closed
11/8/2011	12:49:18 PM	Bypass valve closed
11/8/2011	12:49:18 PM	Bubbler valve closed
11/8/2011	12:49:18 PM	Main Vac valve opened
11/8/2011	12:49:18 PM	Helium MFC set to  0.000000
11/8/2011	12:49:18 PM	H2 MFC set to  0.000000
11/8/2011	12:49:18 PM	BCl3 MFC set to  0.000000
11/8/2011	12:49:18 PM	PHl3 MFC set to  0.000000
11/8/2011	12:49:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	12:49:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	12:49:19 PM	Tube furnace set to 0
11/8/2011	12:49:20 PM	Run finished at 12:49 PM
11/8/2011	1:01:07 PM	Main Vac valve closed
11/8/2011	1:03:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	1:03:09 PM	Recipe started at 1:03 PM
11/8/2011	1:03:09 PM	Helium valve closed
11/8/2011	1:03:09 PM	H2 valve closed
11/8/2011	1:03:09 PM	BCl3 valve closed
11/8/2011	1:03:09 PM	PH3 valve closed
11/8/2011	1:03:09 PM	SiCl4 pre valve closed
11/8/2011	1:03:09 PM	SiCl4 post valve closed
11/8/2011	1:03:09 PM	Main Vac valve closed
11/8/2011	1:03:09 PM	Bubbler valve closed
11/8/2011	1:03:09 PM	Bypass valve opened
11/8/2011	1:03:09 PM	Helium MFC set to  0.000000
11/8/2011	1:03:09 PM	H2 MFC set to  0.000000
11/8/2011	1:03:09 PM	BCl3 MFC set to  0.000000
11/8/2011	1:03:09 PM	PHl3 MFC set to  0.000000
11/8/2011	1:03:09 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:03:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:03:09 PM	Tube furnace set to 0
11/8/2011	1:04:54 PM	Helium valve closed
11/8/2011	1:04:54 PM	H2 valve closed
11/8/2011	1:04:54 PM	BCl3 valve closed
11/8/2011	1:04:54 PM	PH3 valve closed
11/8/2011	1:04:54 PM	SiCl4 pre valve closed
11/8/2011	1:04:54 PM	SiCl4 post valve closed
11/8/2011	1:04:54 PM	Main Vac valve closed
11/8/2011	1:04:54 PM	Bubbler valve closed
11/8/2011	1:04:54 PM	Bypass valve opened
11/8/2011	1:04:54 PM	Helium MFC set to  0.000000
11/8/2011	1:04:54 PM	H2 MFC set to  0.000000
11/8/2011	1:04:54 PM	BCl3 MFC set to  0.000000
11/8/2011	1:04:54 PM	PHl3 MFC set to  0.000000
11/8/2011	1:04:54 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:04:54 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:04:54 PM	Tube furnace set to 0
11/8/2011	1:05:03 PM	Helium valve closed
11/8/2011	1:05:03 PM	H2 valve closed
11/8/2011	1:05:03 PM	BCl3 valve closed
11/8/2011	1:05:03 PM	PH3 valve closed
11/8/2011	1:05:03 PM	SiCl4 pre valve closed
11/8/2011	1:05:03 PM	SiCl4 post valve closed
11/8/2011	1:05:03 PM	Bypass valve closed
11/8/2011	1:05:03 PM	Bubbler valve closed
11/8/2011	1:05:03 PM	Main Vac valve opened
11/8/2011	1:05:03 PM	Helium MFC set to  0.000000
11/8/2011	1:05:03 PM	H2 MFC set to  0.000000
11/8/2011	1:05:03 PM	BCl3 MFC set to  0.000000
11/8/2011	1:05:03 PM	PHl3 MFC set to  0.000000
11/8/2011	1:05:03 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:05:03 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:05:03 PM	Tube furnace set to 0
11/8/2011	1:05:04 PM	Run finished at 1:05 PM
11/8/2011	1:05:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	1:24:33 PM	Main Vac valve closed
11/8/2011	1:26:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	1:26:19 PM	Recipe started at 1:26 PM
11/8/2011	1:26:19 PM	Helium valve closed
11/8/2011	1:26:19 PM	H2 valve closed
11/8/2011	1:26:19 PM	BCl3 valve closed
11/8/2011	1:26:19 PM	PH3 valve closed
11/8/2011	1:26:19 PM	SiCl4 pre valve closed
11/8/2011	1:26:19 PM	SiCl4 post valve closed
11/8/2011	1:26:19 PM	Main Vac valve closed
11/8/2011	1:26:19 PM	Bubbler valve closed
11/8/2011	1:26:19 PM	Bypass valve opened
11/8/2011	1:26:19 PM	Helium MFC set to  0.000000
11/8/2011	1:26:19 PM	H2 MFC set to  0.000000
11/8/2011	1:26:19 PM	BCl3 MFC set to  0.000000
11/8/2011	1:26:19 PM	PHl3 MFC set to  0.000000
11/8/2011	1:26:19 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:26:19 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:26:19 PM	Tube furnace set to 0
11/8/2011	1:28:17 PM	Helium valve closed
11/8/2011	1:28:17 PM	H2 valve closed
11/8/2011	1:28:17 PM	BCl3 valve closed
11/8/2011	1:28:17 PM	PH3 valve closed
11/8/2011	1:28:17 PM	SiCl4 pre valve closed
11/8/2011	1:28:17 PM	SiCl4 post valve closed
11/8/2011	1:28:17 PM	Main Vac valve closed
11/8/2011	1:28:17 PM	Bubbler valve closed
11/8/2011	1:28:17 PM	Bypass valve opened
11/8/2011	1:28:17 PM	Helium MFC set to  0.000000
11/8/2011	1:28:17 PM	H2 MFC set to  0.000000
11/8/2011	1:28:17 PM	BCl3 MFC set to  0.000000
11/8/2011	1:28:17 PM	PHl3 MFC set to  0.000000
11/8/2011	1:28:17 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:28:17 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:28:17 PM	Tube furnace set to 0
11/8/2011	1:29:17 PM	Helium valve closed
11/8/2011	1:29:17 PM	H2 valve closed
11/8/2011	1:29:17 PM	BCl3 valve closed
11/8/2011	1:29:17 PM	PH3 valve closed
11/8/2011	1:29:17 PM	SiCl4 pre valve closed
11/8/2011	1:29:17 PM	SiCl4 post valve closed
11/8/2011	1:29:17 PM	Bypass valve closed
11/8/2011	1:29:17 PM	Bubbler valve closed
11/8/2011	1:29:17 PM	Main Vac valve opened
11/8/2011	1:29:17 PM	Helium MFC set to  0.000000
11/8/2011	1:29:17 PM	H2 MFC set to  0.000000
11/8/2011	1:29:17 PM	BCl3 MFC set to  0.000000
11/8/2011	1:29:17 PM	PHl3 MFC set to  0.000000
11/8/2011	1:29:17 PM	SiCl4 MFC set to  0.000000
11/8/2011	1:29:17 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	1:29:17 PM	Tube furnace set to 0
11/8/2011	1:29:18 PM	Run finished at 1:29 PM
11/8/2011	1:29:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	1:59:24 PM	Main Vac valve closed
11/8/2011	1:59:28 PM	Helium MFC set to  500.000000
11/8/2011	1:59:39 PM	Helium valve opened
11/8/2011	2:00:19 PM	Helium valve closed
11/8/2011	2:00:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	2:00:21 PM	Recipe started at 2:00 PM
11/8/2011	2:00:21 PM	Helium valve closed
11/8/2011	2:00:21 PM	H2 valve closed
11/8/2011	2:00:21 PM	BCl3 valve closed
11/8/2011	2:00:21 PM	PH3 valve closed
11/8/2011	2:00:21 PM	SiCl4 pre valve closed
11/8/2011	2:00:21 PM	SiCl4 post valve closed
11/8/2011	2:00:21 PM	Main Vac valve closed
11/8/2011	2:00:21 PM	Bubbler valve closed
11/8/2011	2:00:21 PM	Bypass valve opened
11/8/2011	2:00:21 PM	Helium MFC set to  0.000000
11/8/2011	2:00:21 PM	H2 MFC set to  0.000000
11/8/2011	2:00:21 PM	BCl3 MFC set to  0.000000
11/8/2011	2:00:21 PM	PHl3 MFC set to  0.000000
11/8/2011	2:00:21 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:00:21 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:00:21 PM	Tube furnace set to 0
11/8/2011	2:01:18 PM	Helium valve closed
11/8/2011	2:01:18 PM	H2 valve closed
11/8/2011	2:01:18 PM	BCl3 valve closed
11/8/2011	2:01:18 PM	PH3 valve closed
11/8/2011	2:01:18 PM	SiCl4 pre valve closed
11/8/2011	2:01:18 PM	SiCl4 post valve closed
11/8/2011	2:01:18 PM	Main Vac valve closed
11/8/2011	2:01:18 PM	Bubbler valve closed
11/8/2011	2:01:18 PM	Bypass valve opened
11/8/2011	2:01:18 PM	Helium MFC set to  0.000000
11/8/2011	2:01:18 PM	H2 MFC set to  0.000000
11/8/2011	2:01:18 PM	BCl3 MFC set to  0.000000
11/8/2011	2:01:18 PM	PHl3 MFC set to  0.000000
11/8/2011	2:01:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:01:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:01:19 PM	Tube furnace set to 0
11/8/2011	2:01:29 PM	Helium valve closed
11/8/2011	2:01:29 PM	H2 valve closed
11/8/2011	2:01:29 PM	BCl3 valve closed
11/8/2011	2:01:29 PM	PH3 valve closed
11/8/2011	2:01:29 PM	SiCl4 pre valve closed
11/8/2011	2:01:29 PM	SiCl4 post valve closed
11/8/2011	2:01:29 PM	Bypass valve closed
11/8/2011	2:01:29 PM	Bubbler valve closed
11/8/2011	2:01:29 PM	Main Vac valve opened
11/8/2011	2:01:29 PM	Helium MFC set to  0.000000
11/8/2011	2:01:29 PM	H2 MFC set to  0.000000
11/8/2011	2:01:29 PM	BCl3 MFC set to  0.000000
11/8/2011	2:01:29 PM	PHl3 MFC set to  0.000000
11/8/2011	2:01:29 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:01:29 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:01:29 PM	Tube furnace set to 0
11/8/2011	2:01:30 PM	Run finished at 2:01 PM
11/8/2011	2:01:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	2:19:11 PM	Tube furnace set to 100
11/8/2011	2:19:57 PM	Recipe started at 2:19 PM
11/8/2011	2:19:57 PM	Helium valve closed
11/8/2011	2:19:57 PM	H2 valve closed
11/8/2011	2:19:57 PM	BCl3 valve closed
11/8/2011	2:19:57 PM	PH3 valve closed
11/8/2011	2:19:57 PM	SiCl4 pre valve closed
11/8/2011	2:19:57 PM	SiCl4 post valve closed
11/8/2011	2:19:57 PM	Main Vac valve closed
11/8/2011	2:19:57 PM	Bypass valve closed
11/8/2011	2:19:57 PM	Bubbler valve closed
11/8/2011	2:19:57 PM	Helium MFC set to  0.000000
11/8/2011	2:19:57 PM	H2 MFC set to  0.000000
11/8/2011	2:19:57 PM	BCl3 MFC set to  0.000000
11/8/2011	2:19:57 PM	PHl3 MFC set to  0.000000
11/8/2011	2:19:57 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:19:57 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:19:57 PM	Tube furnace set to 0
11/8/2011	2:20:00 PM	Helium valve closed
11/8/2011	2:20:00 PM	BCl3 valve closed
11/8/2011	2:20:00 PM	PH3 valve closed
11/8/2011	2:20:00 PM	SiCl4 pre valve closed
11/8/2011	2:20:00 PM	SiCl4 post valve closed
11/8/2011	2:20:00 PM	Main Vac valve closed
11/8/2011	2:20:00 PM	Bypass valve closed
11/8/2011	2:20:00 PM	Bubbler valve closed
11/8/2011	2:20:00 PM	H2 valve opened
11/8/2011	2:20:00 PM	Helium MFC set to  0.000000
11/8/2011	2:20:00 PM	H2 MFC set to  500.000000
11/8/2011	2:20:00 PM	BCl3 MFC set to  0.000000
11/8/2011	2:20:00 PM	PHl3 MFC set to  0.000000
11/8/2011	2:20:00 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:20:00 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:20:00 PM	Tube furnace set to 100
11/8/2011	2:21:07 PM	Helium valve closed
11/8/2011	2:21:07 PM	BCl3 valve closed
11/8/2011	2:21:07 PM	PH3 valve closed
11/8/2011	2:21:07 PM	SiCl4 pre valve closed
11/8/2011	2:21:07 PM	SiCl4 post valve closed
11/8/2011	2:21:07 PM	Main Vac valve closed
11/8/2011	2:21:07 PM	Bypass valve closed
11/8/2011	2:21:07 PM	H2 valve opened
11/8/2011	2:21:07 PM	Bubbler valve opened
11/8/2011	2:21:07 PM	Helium MFC set to  0.000000
11/8/2011	2:21:07 PM	H2 MFC set to  500.000000
11/8/2011	2:21:07 PM	BCl3 MFC set to  0.000000
11/8/2011	2:21:07 PM	PHl3 MFC set to  0.000000
11/8/2011	2:21:07 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:21:07 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:21:07 PM	Tube furnace set to 1000
11/8/2011	2:21:08 PM	Helium valve closed
11/8/2011	2:21:08 PM	BCl3 valve closed
11/8/2011	2:21:08 PM	PH3 valve closed
11/8/2011	2:21:08 PM	SiCl4 pre valve closed
11/8/2011	2:21:08 PM	SiCl4 post valve closed
11/8/2011	2:21:08 PM	Main Vac valve closed
11/8/2011	2:21:08 PM	Bypass valve closed
11/8/2011	2:21:08 PM	H2 valve opened
11/8/2011	2:21:08 PM	Bubbler valve opened
11/8/2011	2:21:08 PM	Helium MFC set to  0.000000
11/8/2011	2:21:08 PM	H2 MFC set to  500.000000
11/8/2011	2:21:08 PM	BCl3 MFC set to  0.000000
11/8/2011	2:21:08 PM	PHl3 MFC set to  0.000000
11/8/2011	2:21:08 PM	SiCl4 MFC set to  0.000000
11/8/2011	2:21:08 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:21:09 PM	Tube furnace set to 1000
11/8/2011	2:43:09 PM	Helium valve closed
11/8/2011	2:43:09 PM	BCl3 valve closed
11/8/2011	2:43:09 PM	PH3 valve closed
11/8/2011	2:43:09 PM	Main Vac valve closed
11/8/2011	2:43:09 PM	Bypass valve closed
11/8/2011	2:43:09 PM	H2 valve opened
11/8/2011	2:43:09 PM	SiCl4 pre valve opened
11/8/2011	2:43:09 PM	SiCl4 post valve opened
11/8/2011	2:43:09 PM	Bubbler valve opened
11/8/2011	2:43:09 PM	Helium MFC set to  0.000000
11/8/2011	2:43:09 PM	H2 MFC set to  500.000000
11/8/2011	2:43:09 PM	BCl3 MFC set to  0.000000
11/8/2011	2:43:09 PM	PHl3 MFC set to  0.000000
11/8/2011	2:43:09 PM	SiCl4 MFC set to  24.000000
11/8/2011	2:43:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	2:43:09 PM	Tube furnace set to 1000
11/8/2011	3:03:09 PM	Helium valve closed
11/8/2011	3:03:09 PM	BCl3 valve closed
11/8/2011	3:03:09 PM	PH3 valve closed
11/8/2011	3:03:09 PM	SiCl4 pre valve closed
11/8/2011	3:03:09 PM	SiCl4 post valve closed
11/8/2011	3:03:09 PM	Main Vac valve closed
11/8/2011	3:03:09 PM	Bypass valve closed
11/8/2011	3:03:09 PM	H2 valve opened
11/8/2011	3:03:09 PM	Bubbler valve opened
11/8/2011	3:03:09 PM	Helium MFC set to  0.000000
11/8/2011	3:03:09 PM	H2 MFC set to  500.000000
11/8/2011	3:03:09 PM	BCl3 MFC set to  0.000000
11/8/2011	3:03:09 PM	PHl3 MFC set to  0.000000
11/8/2011	3:03:09 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:03:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:03:09 PM	Tube furnace set to 950
11/8/2011	3:08:09 PM	Helium valve closed
11/8/2011	3:08:09 PM	BCl3 valve closed
11/8/2011	3:08:09 PM	PH3 valve closed
11/8/2011	3:08:09 PM	SiCl4 pre valve closed
11/8/2011	3:08:09 PM	SiCl4 post valve closed
11/8/2011	3:08:09 PM	Main Vac valve closed
11/8/2011	3:08:09 PM	Bypass valve closed
11/8/2011	3:08:09 PM	H2 valve opened
11/8/2011	3:08:09 PM	Bubbler valve opened
11/8/2011	3:08:09 PM	Helium MFC set to  0.000000
11/8/2011	3:08:09 PM	H2 MFC set to  500.000000
11/8/2011	3:08:09 PM	BCl3 MFC set to  0.000000
11/8/2011	3:08:09 PM	PHl3 MFC set to  0.000000
11/8/2011	3:08:09 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:08:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:08:09 PM	Tube furnace set to 750
11/8/2011	3:13:09 PM	Helium valve closed
11/8/2011	3:13:09 PM	BCl3 valve closed
11/8/2011	3:13:09 PM	PH3 valve closed
11/8/2011	3:13:09 PM	SiCl4 pre valve closed
11/8/2011	3:13:09 PM	SiCl4 post valve closed
11/8/2011	3:13:09 PM	Main Vac valve closed
11/8/2011	3:13:09 PM	Bypass valve closed
11/8/2011	3:13:09 PM	H2 valve opened
11/8/2011	3:13:09 PM	Bubbler valve opened
11/8/2011	3:13:09 PM	Helium MFC set to  0.000000
11/8/2011	3:13:09 PM	H2 MFC set to  500.000000
11/8/2011	3:13:09 PM	BCl3 MFC set to  0.000000
11/8/2011	3:13:09 PM	PHl3 MFC set to  0.000000
11/8/2011	3:13:09 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:13:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:13:09 PM	Tube furnace set to 750
11/8/2011	3:18:09 PM	H2 valve closed
11/8/2011	3:18:09 PM	BCl3 valve closed
11/8/2011	3:18:09 PM	PH3 valve closed
11/8/2011	3:18:09 PM	SiCl4 pre valve closed
11/8/2011	3:18:09 PM	SiCl4 post valve closed
11/8/2011	3:18:09 PM	Main Vac valve closed
11/8/2011	3:18:09 PM	Bypass valve closed
11/8/2011	3:18:09 PM	Helium valve opened
11/8/2011	3:18:09 PM	Bubbler valve opened
11/8/2011	3:18:09 PM	Helium MFC set to  400.000000
11/8/2011	3:18:09 PM	H2 MFC set to  0.000000
11/8/2011	3:18:09 PM	BCl3 MFC set to  0.000000
11/8/2011	3:18:09 PM	PHl3 MFC set to  0.000000
11/8/2011	3:18:09 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:18:09 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:18:09 PM	Tube furnace set to 0
11/8/2011	3:40:45 PM	Run aborted at 3:40 PM
11/8/2011	3:40:45 PM	Helium valve closed
11/8/2011	3:40:45 PM	H2 valve closed
11/8/2011	3:40:45 PM	BCl3 valve closed
11/8/2011	3:40:45 PM	PH3 valve closed
11/8/2011	3:40:45 PM	SiCl4 pre valve closed
11/8/2011	3:40:45 PM	SiCl4 post valve closed
11/8/2011	3:40:45 PM	Bypass valve closed
11/8/2011	3:40:45 PM	Main Vac valve closed
11/8/2011	3:40:45 PM	Bubbler valve closed
11/8/2011	3:40:45 PM	Helium MFC set to  0.000000
11/8/2011	3:40:45 PM	H2 MFC set to  0.000000
11/8/2011	3:40:45 PM	BCl3 MFC set to  0.000000
11/8/2011	3:40:45 PM	PHl3 MFC set to  0.000000
11/8/2011	3:40:45 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:40:46 PM	Tube furnace set to 0
11/8/2011	3:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	3:41:54 PM	Recipe started at 3:41 PM
11/8/2011	3:41:54 PM	Helium valve closed
11/8/2011	3:41:54 PM	H2 valve closed
11/8/2011	3:41:54 PM	BCl3 valve closed
11/8/2011	3:41:54 PM	PH3 valve closed
11/8/2011	3:41:54 PM	SiCl4 pre valve closed
11/8/2011	3:41:54 PM	SiCl4 post valve closed
11/8/2011	3:41:54 PM	Main Vac valve closed
11/8/2011	3:41:54 PM	Bubbler valve closed
11/8/2011	3:41:54 PM	Bypass valve opened
11/8/2011	3:41:54 PM	Helium MFC set to  0.000000
11/8/2011	3:41:54 PM	H2 MFC set to  0.000000
11/8/2011	3:41:54 PM	BCl3 MFC set to  0.000000
11/8/2011	3:41:54 PM	PHl3 MFC set to  0.000000
11/8/2011	3:41:54 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:41:54 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:41:54 PM	Tube furnace set to 0
11/8/2011	3:42:54 PM	Helium valve closed
11/8/2011	3:42:54 PM	H2 valve closed
11/8/2011	3:42:54 PM	BCl3 valve closed
11/8/2011	3:42:54 PM	PH3 valve closed
11/8/2011	3:42:54 PM	SiCl4 pre valve closed
11/8/2011	3:42:54 PM	SiCl4 post valve closed
11/8/2011	3:42:54 PM	Main Vac valve closed
11/8/2011	3:42:54 PM	Bubbler valve closed
11/8/2011	3:42:54 PM	Bypass valve opened
11/8/2011	3:42:54 PM	Helium MFC set to  0.000000
11/8/2011	3:42:54 PM	H2 MFC set to  0.000000
11/8/2011	3:42:54 PM	BCl3 MFC set to  0.000000
11/8/2011	3:42:54 PM	PHl3 MFC set to  0.000000
11/8/2011	3:42:54 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:42:54 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:42:54 PM	Tube furnace set to 0
11/8/2011	3:43:54 PM	Helium valve closed
11/8/2011	3:43:54 PM	H2 valve closed
11/8/2011	3:43:54 PM	BCl3 valve closed
11/8/2011	3:43:54 PM	PH3 valve closed
11/8/2011	3:43:54 PM	SiCl4 pre valve closed
11/8/2011	3:43:54 PM	SiCl4 post valve closed
11/8/2011	3:43:54 PM	Bypass valve closed
11/8/2011	3:43:54 PM	Bubbler valve closed
11/8/2011	3:43:54 PM	Main Vac valve opened
11/8/2011	3:43:54 PM	Helium MFC set to  0.000000
11/8/2011	3:43:54 PM	H2 MFC set to  0.000000
11/8/2011	3:43:54 PM	BCl3 MFC set to  0.000000
11/8/2011	3:43:54 PM	PHl3 MFC set to  0.000000
11/8/2011	3:43:54 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:43:54 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:43:54 PM	Tube furnace set to 0
11/8/2011	3:43:55 PM	Run finished at 3:43 PM
11/8/2011	3:43:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	3:49:48 PM	Main Vac valve closed
11/8/2011	3:51:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	3:51:14 PM	Recipe started at 3:51 PM
11/8/2011	3:51:14 PM	Helium valve closed
11/8/2011	3:51:14 PM	H2 valve closed
11/8/2011	3:51:14 PM	BCl3 valve closed
11/8/2011	3:51:14 PM	PH3 valve closed
11/8/2011	3:51:14 PM	SiCl4 pre valve closed
11/8/2011	3:51:14 PM	SiCl4 post valve closed
11/8/2011	3:51:14 PM	Main Vac valve closed
11/8/2011	3:51:14 PM	Bubbler valve closed
11/8/2011	3:51:14 PM	Bypass valve opened
11/8/2011	3:51:14 PM	Helium MFC set to  0.000000
11/8/2011	3:51:14 PM	H2 MFC set to  0.000000
11/8/2011	3:51:14 PM	BCl3 MFC set to  0.000000
11/8/2011	3:51:14 PM	PHl3 MFC set to  0.000000
11/8/2011	3:51:14 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:51:14 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:51:14 PM	Tube furnace set to 0
11/8/2011	3:52:27 PM	Helium valve closed
11/8/2011	3:52:27 PM	H2 valve closed
11/8/2011	3:52:27 PM	BCl3 valve closed
11/8/2011	3:52:27 PM	PH3 valve closed
11/8/2011	3:52:27 PM	SiCl4 pre valve closed
11/8/2011	3:52:27 PM	SiCl4 post valve closed
11/8/2011	3:52:27 PM	Main Vac valve closed
11/8/2011	3:52:27 PM	Bubbler valve closed
11/8/2011	3:52:27 PM	Bypass valve opened
11/8/2011	3:52:27 PM	Helium MFC set to  0.000000
11/8/2011	3:52:27 PM	H2 MFC set to  0.000000
11/8/2011	3:52:27 PM	BCl3 MFC set to  0.000000
11/8/2011	3:52:27 PM	PHl3 MFC set to  0.000000
11/8/2011	3:52:27 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:52:27 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:52:28 PM	Tube furnace set to 0
11/8/2011	3:52:54 PM	Helium valve closed
11/8/2011	3:52:54 PM	H2 valve closed
11/8/2011	3:52:54 PM	BCl3 valve closed
11/8/2011	3:52:54 PM	PH3 valve closed
11/8/2011	3:52:54 PM	SiCl4 pre valve closed
11/8/2011	3:52:54 PM	SiCl4 post valve closed
11/8/2011	3:52:54 PM	Bypass valve closed
11/8/2011	3:52:54 PM	Bubbler valve closed
11/8/2011	3:52:54 PM	Main Vac valve opened
11/8/2011	3:52:54 PM	Helium MFC set to  0.000000
11/8/2011	3:52:54 PM	H2 MFC set to  0.000000
11/8/2011	3:52:54 PM	BCl3 MFC set to  0.000000
11/8/2011	3:52:54 PM	PHl3 MFC set to  0.000000
11/8/2011	3:52:54 PM	SiCl4 MFC set to  0.000000
11/8/2011	3:52:54 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	3:52:54 PM	Tube furnace set to 0
11/8/2011	3:52:55 PM	Run finished at 3:52 PM
11/8/2011	3:52:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	6:37:05 PM	Recipe started at 6:37 PM
11/8/2011	6:37:05 PM	Helium valve closed
11/8/2011	6:37:05 PM	H2 valve closed
11/8/2011	6:37:05 PM	BCl3 valve closed
11/8/2011	6:37:05 PM	PH3 valve closed
11/8/2011	6:37:05 PM	SiCl4 pre valve closed
11/8/2011	6:37:05 PM	SiCl4 post valve closed
11/8/2011	6:37:05 PM	Main Vac valve closed
11/8/2011	6:37:05 PM	Bypass valve closed
11/8/2011	6:37:05 PM	Bubbler valve closed
11/8/2011	6:37:05 PM	Helium MFC set to  0.000000
11/8/2011	6:37:05 PM	H2 MFC set to  0.000000
11/8/2011	6:37:05 PM	BCl3 MFC set to  0.000000
11/8/2011	6:37:05 PM	PHl3 MFC set to  0.000000
11/8/2011	6:37:05 PM	SiCl4 MFC set to  0.000000
11/8/2011	6:37:05 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	6:37:05 PM	Tube furnace set to 0
11/8/2011	6:37:08 PM	Helium valve closed
11/8/2011	6:37:08 PM	BCl3 valve closed
11/8/2011	6:37:08 PM	PH3 valve closed
11/8/2011	6:37:08 PM	SiCl4 pre valve closed
11/8/2011	6:37:08 PM	SiCl4 post valve closed
11/8/2011	6:37:08 PM	Main Vac valve closed
11/8/2011	6:37:08 PM	Bypass valve closed
11/8/2011	6:37:08 PM	Bubbler valve closed
11/8/2011	6:37:08 PM	H2 valve opened
11/8/2011	6:37:08 PM	Helium MFC set to  0.000000
11/8/2011	6:37:08 PM	H2 MFC set to  500.000000
11/8/2011	6:37:08 PM	BCl3 MFC set to  0.000000
11/8/2011	6:37:08 PM	PHl3 MFC set to  0.000000
11/8/2011	6:37:08 PM	SiCl4 MFC set to  0.000000
11/8/2011	6:37:08 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	6:37:08 PM	Tube furnace set to 100
11/8/2011	6:38:16 PM	Helium valve closed
11/8/2011	6:38:16 PM	BCl3 valve closed
11/8/2011	6:38:16 PM	PH3 valve closed
11/8/2011	6:38:16 PM	SiCl4 pre valve closed
11/8/2011	6:38:16 PM	SiCl4 post valve closed
11/8/2011	6:38:16 PM	Main Vac valve closed
11/8/2011	6:38:16 PM	Bypass valve closed
11/8/2011	6:38:16 PM	H2 valve opened
11/8/2011	6:38:16 PM	Bubbler valve opened
11/8/2011	6:38:16 PM	Helium MFC set to  0.000000
11/8/2011	6:38:16 PM	H2 MFC set to  500.000000
11/8/2011	6:38:16 PM	BCl3 MFC set to  0.000000
11/8/2011	6:38:16 PM	PHl3 MFC set to  0.000000
11/8/2011	6:38:16 PM	SiCl4 MFC set to  0.000000
11/8/2011	6:38:16 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	6:38:16 PM	Tube furnace set to 1000
11/8/2011	6:38:17 PM	Helium valve closed
11/8/2011	6:38:17 PM	BCl3 valve closed
11/8/2011	6:38:17 PM	PH3 valve closed
11/8/2011	6:38:17 PM	SiCl4 pre valve closed
11/8/2011	6:38:17 PM	SiCl4 post valve closed
11/8/2011	6:38:17 PM	Main Vac valve closed
11/8/2011	6:38:17 PM	Bypass valve closed
11/8/2011	6:38:17 PM	H2 valve opened
11/8/2011	6:38:17 PM	Bubbler valve opened
11/8/2011	6:38:17 PM	Helium MFC set to  0.000000
11/8/2011	6:38:17 PM	H2 MFC set to  500.000000
11/8/2011	6:38:17 PM	BCl3 MFC set to  0.000000
11/8/2011	6:38:17 PM	PHl3 MFC set to  0.000000
11/8/2011	6:38:17 PM	SiCl4 MFC set to  0.000000
11/8/2011	6:38:17 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	6:38:17 PM	Tube furnace set to 1000
11/8/2011	7:00:17 PM	Helium valve closed
11/8/2011	7:00:17 PM	BCl3 valve closed
11/8/2011	7:00:17 PM	PH3 valve closed
11/8/2011	7:00:17 PM	Main Vac valve closed
11/8/2011	7:00:17 PM	Bypass valve closed
11/8/2011	7:00:17 PM	H2 valve opened
11/8/2011	7:00:17 PM	SiCl4 pre valve opened
11/8/2011	7:00:17 PM	SiCl4 post valve opened
11/8/2011	7:00:17 PM	Bubbler valve opened
11/8/2011	7:00:17 PM	Helium MFC set to  0.000000
11/8/2011	7:00:17 PM	H2 MFC set to  500.000000
11/8/2011	7:00:17 PM	BCl3 MFC set to  0.000000
11/8/2011	7:00:17 PM	PHl3 MFC set to  0.000000
11/8/2011	7:00:17 PM	SiCl4 MFC set to  28.000000
11/8/2011	7:00:17 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:00:18 PM	Tube furnace set to 1000
11/8/2011	7:20:17 PM	Helium valve closed
11/8/2011	7:20:17 PM	BCl3 valve closed
11/8/2011	7:20:17 PM	PH3 valve closed
11/8/2011	7:20:17 PM	SiCl4 pre valve closed
11/8/2011	7:20:17 PM	SiCl4 post valve closed
11/8/2011	7:20:17 PM	Main Vac valve closed
11/8/2011	7:20:17 PM	Bypass valve closed
11/8/2011	7:20:17 PM	H2 valve opened
11/8/2011	7:20:17 PM	Bubbler valve opened
11/8/2011	7:20:17 PM	Helium MFC set to  0.000000
11/8/2011	7:20:17 PM	H2 MFC set to  500.000000
11/8/2011	7:20:18 PM	BCl3 MFC set to  0.000000
11/8/2011	7:20:18 PM	PHl3 MFC set to  0.000000
11/8/2011	7:20:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:20:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:20:18 PM	Tube furnace set to 950
11/8/2011	7:25:18 PM	Helium valve closed
11/8/2011	7:25:18 PM	BCl3 valve closed
11/8/2011	7:25:18 PM	PH3 valve closed
11/8/2011	7:25:18 PM	SiCl4 pre valve closed
11/8/2011	7:25:18 PM	SiCl4 post valve closed
11/8/2011	7:25:18 PM	Main Vac valve closed
11/8/2011	7:25:18 PM	Bypass valve closed
11/8/2011	7:25:18 PM	H2 valve opened
11/8/2011	7:25:18 PM	Bubbler valve opened
11/8/2011	7:25:18 PM	Helium MFC set to  0.000000
11/8/2011	7:25:18 PM	H2 MFC set to  500.000000
11/8/2011	7:25:18 PM	BCl3 MFC set to  0.000000
11/8/2011	7:25:18 PM	PHl3 MFC set to  0.000000
11/8/2011	7:25:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:25:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:25:18 PM	Tube furnace set to 750
11/8/2011	7:30:18 PM	Helium valve closed
11/8/2011	7:30:18 PM	BCl3 valve closed
11/8/2011	7:30:18 PM	PH3 valve closed
11/8/2011	7:30:18 PM	SiCl4 pre valve closed
11/8/2011	7:30:18 PM	SiCl4 post valve closed
11/8/2011	7:30:18 PM	Main Vac valve closed
11/8/2011	7:30:18 PM	Bypass valve closed
11/8/2011	7:30:18 PM	H2 valve opened
11/8/2011	7:30:18 PM	Bubbler valve opened
11/8/2011	7:30:18 PM	Helium MFC set to  0.000000
11/8/2011	7:30:18 PM	H2 MFC set to  500.000000
11/8/2011	7:30:18 PM	BCl3 MFC set to  0.000000
11/8/2011	7:30:18 PM	PHl3 MFC set to  0.000000
11/8/2011	7:30:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:30:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:30:18 PM	Tube furnace set to 750
11/8/2011	7:35:18 PM	H2 valve closed
11/8/2011	7:35:18 PM	BCl3 valve closed
11/8/2011	7:35:18 PM	PH3 valve closed
11/8/2011	7:35:18 PM	SiCl4 pre valve closed
11/8/2011	7:35:18 PM	SiCl4 post valve closed
11/8/2011	7:35:18 PM	Main Vac valve closed
11/8/2011	7:35:18 PM	Bypass valve closed
11/8/2011	7:35:18 PM	Helium valve opened
11/8/2011	7:35:18 PM	Bubbler valve opened
11/8/2011	7:35:18 PM	Helium MFC set to  400.000000
11/8/2011	7:35:18 PM	H2 MFC set to  0.000000
11/8/2011	7:35:18 PM	BCl3 MFC set to  0.000000
11/8/2011	7:35:18 PM	PHl3 MFC set to  0.000000
11/8/2011	7:35:18 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:35:18 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:35:18 PM	Tube furnace set to 0
11/8/2011	7:54:11 PM	Run aborted at 7:54 PM
11/8/2011	7:54:11 PM	Helium valve closed
11/8/2011	7:54:11 PM	H2 valve closed
11/8/2011	7:54:11 PM	BCl3 valve closed
11/8/2011	7:54:11 PM	PH3 valve closed
11/8/2011	7:54:11 PM	SiCl4 pre valve closed
11/8/2011	7:54:11 PM	SiCl4 post valve closed
11/8/2011	7:54:11 PM	Bypass valve closed
11/8/2011	7:54:11 PM	Main Vac valve closed
11/8/2011	7:54:11 PM	Bubbler valve closed
11/8/2011	7:54:11 PM	Helium MFC set to  0.000000
11/8/2011	7:54:11 PM	H2 MFC set to  0.000000
11/8/2011	7:54:11 PM	BCl3 MFC set to  0.000000
11/8/2011	7:54:11 PM	PHl3 MFC set to  0.000000
11/8/2011	7:54:11 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:54:11 PM	Tube furnace set to 0
11/8/2011	7:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/8/2011	7:55:15 PM	Recipe started at 7:55 PM
11/8/2011	7:55:15 PM	Helium valve closed
11/8/2011	7:55:15 PM	H2 valve closed
11/8/2011	7:55:15 PM	BCl3 valve closed
11/8/2011	7:55:15 PM	PH3 valve closed
11/8/2011	7:55:15 PM	SiCl4 pre valve closed
11/8/2011	7:55:15 PM	SiCl4 post valve closed
11/8/2011	7:55:15 PM	Main Vac valve closed
11/8/2011	7:55:15 PM	Bubbler valve closed
11/8/2011	7:55:15 PM	Bypass valve opened
11/8/2011	7:55:15 PM	Helium MFC set to  0.000000
11/8/2011	7:55:15 PM	H2 MFC set to  0.000000
11/8/2011	7:55:15 PM	BCl3 MFC set to  0.000000
11/8/2011	7:55:15 PM	PHl3 MFC set to  0.000000
11/8/2011	7:55:15 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:55:15 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:55:15 PM	Tube furnace set to 0
11/8/2011	7:56:15 PM	Helium valve closed
11/8/2011	7:56:15 PM	H2 valve closed
11/8/2011	7:56:15 PM	BCl3 valve closed
11/8/2011	7:56:15 PM	PH3 valve closed
11/8/2011	7:56:15 PM	SiCl4 pre valve closed
11/8/2011	7:56:15 PM	SiCl4 post valve closed
11/8/2011	7:56:15 PM	Main Vac valve closed
11/8/2011	7:56:15 PM	Bubbler valve closed
11/8/2011	7:56:15 PM	Bypass valve opened
11/8/2011	7:56:15 PM	Helium MFC set to  0.000000
11/8/2011	7:56:15 PM	H2 MFC set to  0.000000
11/8/2011	7:56:15 PM	BCl3 MFC set to  0.000000
11/8/2011	7:56:15 PM	PHl3 MFC set to  0.000000
11/8/2011	7:56:15 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:56:15 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:56:15 PM	Tube furnace set to 0
11/8/2011	7:57:15 PM	Helium valve closed
11/8/2011	7:57:15 PM	H2 valve closed
11/8/2011	7:57:15 PM	BCl3 valve closed
11/8/2011	7:57:15 PM	PH3 valve closed
11/8/2011	7:57:15 PM	SiCl4 pre valve closed
11/8/2011	7:57:15 PM	SiCl4 post valve closed
11/8/2011	7:57:15 PM	Bypass valve closed
11/8/2011	7:57:15 PM	Bubbler valve closed
11/8/2011	7:57:15 PM	Main Vac valve opened
11/8/2011	7:57:15 PM	Helium MFC set to  0.000000
11/8/2011	7:57:15 PM	H2 MFC set to  0.000000
11/8/2011	7:57:15 PM	BCl3 MFC set to  0.000000
11/8/2011	7:57:15 PM	PHl3 MFC set to  0.000000
11/8/2011	7:57:15 PM	SiCl4 MFC set to  0.000000
11/8/2011	7:57:15 PM	Bypass solenoid MFC set to  0.000000
11/8/2011	7:57:15 PM	Tube furnace set to 0
11/8/2011	7:57:16 PM	Run finished at 7:57 PM
11/8/2011	7:57:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
